Richard B. Brown - Research
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Integrated Optical and Potentiometric Sensors
Graduate Student Researcher: Robert Hower

 Optical and potentiometric chemical sensors have been integrated on a single silicon chip in this project to increase dynamic range and allow sensing of additional species. Data collected in this manner by redundant sensors utilizing different transduction techniques are very reliable. The sensors and their on-chip readout circuitry are implemented in an SOI CMOS process developed in the University of Michigan Solid-State Electronics Laboratory. The potentiometric membranes were improved to increase manufacturing yield and sensor performance, and thin, uniform optical membranes have been fabricated using a novel dispensing method.